Phys. Rev. Lett. 100, 056805 (2008) [4 pages]Real-Time TEM Imaging of the Formation of Crystalline Nanoscale GapsReceived 9 August 2007; published 7 February 2008 We present real-time transmission electron microscopy of nanogap formation by feedback controlled electromigration that reveals a remarkable degree of crystalline order. Crystal facets appear during feedback controlled electromigration indicating a layer-by-layer, highly reproducible electromigration process avoiding thermal runaway and melting. These measurements provide insight into the electromigration induced failure mechanism in sub-20 nm size interconnects, indicating that the current density at failure increases as the width decreases to approximately 1 nm. © 2008 The American Physical Society URL:
http://link.aps.org/doi/10.1103/PhysRevLett.100.056805
DOI:
10.1103/PhysRevLett.100.056805
PACS:
85.65.+h, 73.22.−f, 73.40.Jn, 73.63.Rt
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