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Phys. Rev. Lett. 41, 1246–1249 (1978)

Segregation Effects in Cu-Implanted Si after Laser-Pulse Melting

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P. Baeri, S. U. Campisano, G. Foti, and E. Rimini
Istituto di Struttura della Materia, 195129 Catania, Italy

Received 4 August 1978; published in the issue dated 30 October 1978

Cu-implanted Si crystals were irradiated with Q-switched ruby-laser single pulses. After irradiation with energy density in excess of 1.0 J/cm2, the Cu atoms accumulate at the sample surface. Thermal annealing in the 500-800°C range casues a migration of Cu inside the specimen, in agreement with diffusion coefficient and solid solubility values. The results indicate the formation of a liquid layer induced by laser irradiation. The solid-liquid interface movement during freezing qualitatively justifies the observed surface accumulation.

© 1978 The American Physical Society

URL:
http://link.aps.org/doi/10.1103/PhysRevLett.41.1246
DOI:
10.1103/PhysRevLett.41.1246
PACS: