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Phys. Rev. Lett. 69, 3743–3746 (1992)

Phase retrieval through focus variation for ultra-resolution in field-emission transmission electron microscopy

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Wim Coene and Guido Janssen
Philips Research Laboratories, 5600 JA Eindhoven, The Netherlands

Marc Op de Beeck and Dirk Van Dyck
EMAT, University of Antwerp (RUCA), B-2020 Antwerp, Belgium

Received 30 July 1992; published in the issue dated 28 December 1992

The use of a coherent field-emission electron source in transmission electron microscopy is combined with phase retrieval by digital processing of a focal image series. For the first time, a dramatic improvement of the high-resolution performance of the electron microscope beyond the usual ‘‘point-to-point’’ resolution has been realized: Experiments on a 200-kV microscope with a point resolution of 0.24 nm reveal reconstructed information down to 0.14 nm. Examples are shown in the field of high-Tc superconductors and ferroelectric oxides. The oxygen sublattice in these structures is revealed.

© 1992 The American Physical Society

URL:
http://link.aps.org/doi/10.1103/PhysRevLett.69.3743
DOI:
10.1103/PhysRevLett.69.3743
PACS:
61.16.Di