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Phys. Rev. Lett. 81, 4156–4159 (1998)

Subangstrom Resolution by Underfocused Incoherent Transmission Electron Microscopy

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P. D. Nellist1,* and S. J. Pennycook2
1Cavendish Laboratory, University of Cambridge, Madingley Road, Cambridge CB3 0HE, United Kingdom
2Oak Ridge National Laboratory, Solid State Division, P.O. Box 2008, Oak Ridge, Tennessee 37831-6030

Received 24 June 1998; published in the issue dated 9 November 1998

See accompanying Physics Focus

It is quantitatively explained why incoherent transmission electron microscope imaging is extremely robust to the effects of chromatic aberration, which usually limits the resolution in the conventional coherent mode of imaging. Combining this robustness with using underfocus to counter the effects of spherical aberration, we demonstrate subangstrom lattice resolution and information transfer to 0.078 nm.

© 1998 The American Physical Society

URL:
http://link.aps.org/doi/10.1103/PhysRevLett.81.4156
DOI:
10.1103/PhysRevLett.81.4156
PACS:
07.78.+s, 41.85.-p, 41.85.Gy, 61.16.Bg

*Now at Nanoscale Physics Research Laboratory, School of Physics and Astronomy, The University of Birmingham, U.K. Electronic address: P.D.Nellist@bham.ac.uk