Phys. Rev. Lett. 82, 3460–3463 (1999)High Resolution Radial Distribution Function of Pure Amorphous SiliconReceived 23 November 1998; published in the issue dated 26 April 1999 The structure factor S(Q) of high purity amorphous Si membranes prepared by ion implantation was measured over an extended Q range ( 0.03–55Å-1). Calculation of the first neighbor shell coordination ( C1) as a function of maximum Q indicates that measurement of S(Q) out to at least 40Å-1 is required to reliably determine the radial distribution function (RDF). A 2% change in C1 and subtle changes in the rest of the RDF were observed upon annealing, consistent with point defect removal. After annealing at 600 °C, C1 = 3.88, which would explain why amorphous Si is less dense than crystalline Si. © 1999 The American Physical Society URL:
http://link.aps.org/doi/10.1103/PhysRevLett.82.3460
DOI:
10.1103/PhysRevLett.82.3460
PACS:
61.43.Dq, 61.10.Eq
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