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APS » Journals » Phys. Rev. Lett. » Volume 82 » Issue 20
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Phys. Rev. Lett. 82, 4038–4041 (1999)

Steering-Enhanced Roughening during Metal Deposition at Grazing Incidence

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Sebastiaan van Dijken, Louis C. Jorritsma*, and Bene Poelsema
Faculty of Applied Physics and Centre of Materials Research, University of Twente, P.O. Box 217, NL-7500 AE Enschede, The Netherlands

Received 11 December 1998; published in the issue dated 17 May 1999

It is shown that steering may have an important influence on the morphology of growing films. Steering originates from long-range attractive forces between incoming atoms and substrate atoms and leads to preferential arrival of atoms on top of islands. This phenomenon is most pronounced for grazing incidence deposition and results in significantly increased roughness of the growing film. Steering, which is expected to be generally valid but has so far been disregarded in growth studies, is illustrated for the growth of Cu/Cu(001).

© 1999 The American Physical Society

URL:
http://link.aps.org/doi/10.1103/PhysRevLett.82.4038
DOI:
10.1103/PhysRevLett.82.4038
PACS:
68.55.Jk, 61.14.Hg, 68.35.Bs, 81.10.-h

*Present address: ASML, P.O. Box 324, NL-5500 AH Veldhoven, The Netherlands.

 
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