Phys. Rev. Lett. 86, 4556–4559 (2001)Thermodynamics of C Incorporation on Si(100) from ab initio CalculationsReceived 3 August 2000; published in the issue dated 14 May 2001 We study the thermodynamics of C incorporation on Si(100), a system where strain and chemical effects are both important. Our analysis is based on first-principles atomistic calculations to obtain the important lowest-energy structures, and a classical effective Hamiltonian which is employed to represent the long-range strain effects and incorporate the thermodynamic aspects. We determine the equilibrium phase diagram in temperature and C chemical potential, which allows us to predict the mesoscopic structure of the system that should be observed under experimentally relevant conditions. © 2001 The American Physical Society URL:
http://link.aps.org/doi/10.1103/PhysRevLett.86.4556
DOI:
10.1103/PhysRevLett.86.4556
PACS:
61.66.Dk, 68.35.Bs, 68.35.Rh
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