Phys. Rev. Lett. 99, 264801 (2007) [4 pages]Zone-Doubling Technique to Produce Ultrahigh-Resolution X-Ray OpticsReceived 18 September 2007; published 28 December 2007 A method for the fabrication of ultrahigh-resolution Fresnel zone plate lenses for x-ray microscopy is demonstrated. It is based on the deposition of a zone plate material (Ir) onto the sidewalls of a prepatterned template structure (Si) using an atomic layer deposition technique. This results in a doubling of the effective zone density, thus improving the achievable resolution of x-ray microscopes. Test structures with lines and spaces down to 15 nm were resolved in a scanning transmission x-ray microscope at 1 keV photon energy. © 2007 The American Physical Society URL:
http://link.aps.org/doi/10.1103/PhysRevLett.99.264801
DOI:
10.1103/PhysRevLett.99.264801
PACS:
41.50.+h, 07.85.Qe, 07.85.Tt
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