Achromatic elemental mapping beyond the nanoscale in the transmission electron microscope

Accepted

Newly developed achromatic electron optics allows the use of wide energy windows and makes feasible energy-filtered transmission electron microscopy (EFTEM) at atomic resolution. In this paper we present EFTEM images formed using electrons that have undergone a silicon L2,3 core-shell energy loss, exhibiting a resolution in EFTEM of 1.35 ��. This permits elemental mapping beyond the nanoscale provided that quantum mechanical calculations from first principles are done in tandem with the experiment to understand the physical information encoded in the images.